JPH0419483B2 - - Google Patents

Info

Publication number
JPH0419483B2
JPH0419483B2 JP27501886A JP27501886A JPH0419483B2 JP H0419483 B2 JPH0419483 B2 JP H0419483B2 JP 27501886 A JP27501886 A JP 27501886A JP 27501886 A JP27501886 A JP 27501886A JP H0419483 B2 JPH0419483 B2 JP H0419483B2
Authority
JP
Japan
Prior art keywords
signal
hold
level
original
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP27501886A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63128204A (ja
Inventor
Sadamitsu Nishihara
Hiromasa Doi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP27501886A priority Critical patent/JPS63128204A/ja
Publication of JPS63128204A publication Critical patent/JPS63128204A/ja
Publication of JPH0419483B2 publication Critical patent/JPH0419483B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP27501886A 1986-11-18 1986-11-18 光学式エツジ検出装置 Granted JPS63128204A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27501886A JPS63128204A (ja) 1986-11-18 1986-11-18 光学式エツジ検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27501886A JPS63128204A (ja) 1986-11-18 1986-11-18 光学式エツジ検出装置

Publications (2)

Publication Number Publication Date
JPS63128204A JPS63128204A (ja) 1988-05-31
JPH0419483B2 true JPH0419483B2 (en]) 1992-03-30

Family

ID=17549728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27501886A Granted JPS63128204A (ja) 1986-11-18 1986-11-18 光学式エツジ検出装置

Country Status (1)

Country Link
JP (1) JPS63128204A (en])

Also Published As

Publication number Publication date
JPS63128204A (ja) 1988-05-31

Similar Documents

Publication Publication Date Title
US4652765A (en) Edge detecting device in optical measuring instrument
CN101852676B (zh) 多焦全息差动共焦超长焦距测量方法与装置
US4652738A (en) Edge detecting device in optical measuring instrument
UST102104I4 (en) Scanning optical system adapted for linewidth measurement in semiconductor devices
US4557602A (en) Edge detector in optical measuring instrument
JPH0419483B2 (en])
CN109990735B (zh) 用于提高自准直仪测量精度的光源频率调制装置及方法
JPS63131011A (ja) 光学式エツジ検出装置
JPS61120905A (ja) 光学式測定機器におけるエツジ検出装置
JPS6222004A (ja) 光軸位置検出方法
JPS61175506A (ja) 光電式測定機器における受光センサ−構造
JPH0419482B2 (en])
SU1188538A1 (ru) Устройство дл измерени линейных размеров прозрачных и полупрозрачных тел
GB2114285A (en) Optical inspection of machined surfaces
JPH0378561B2 (en])
JPH01156694A (ja) 光電スイッチ
JPS61122505A (ja) 光学式測定機器におけるエツジ検出装置
JPH0419481B2 (en])
JPS61118606A (ja) 光学式寸法測定機
JPS6324112A (ja) 投影画像のエツジ検出装置
JPH0733963B2 (ja) 拡大投影機
JPS6179106A (ja) 光学式測定機器におけるエツジ検出装置
JPH03126906A (ja) 焦点調節装置
JPS5830521B2 (ja) 寸法測定器
JPH0425663B2 (en])

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees